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Surface chemical analysis. Secondary-ion mass spectrometry. Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry
Description
Surface chemical analysis. Secondary-ion mass spectrometry. Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry1 Scope This International Standard specifies a method for confirming the repeatability and constancy of the positive ion relative intensity scale of static secondary ion mass spectrometers, for general analytical purposes. It is only applicable to instruments that incorporate an electron gun for charge neutralization. It is not intended to be a calibration of the intensity mass response function. That calibration may be made by the instrument
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